Nanometrics Reflectometer

The Nanometrics reflectometer is used for measurement of thickness of thin films on silicon substrates. The equipment works in the visible spectra, and the measurement requires the knowledge of the refractive index value. The spatial resolution is 10 µm, thereby providing the capability of measuring the spatial uniformity of the thickness of the deposited film.


This tool is available to external users for a reasonable fee. Please contact us for further details.