MRC 944 - ITO Sputtering tool

The MRC 944 tool is used for deposition of TCO on the wafers. It can deposit layers of ITO,IZO, and Silver of varying thickness. The tool is capable of processing 125mm as well as 156mm wafers. The tool uses pallets for processing which can accommodate 4 wafers at a time. The Solar Power Lab uses masks to isolate the front and the back of the cell to prevent shunting. The tool consists of a load lock chamber and three chambers each for depositing ITO, IZO and silver respectively.