Process Equipment

The solar power labs posses equipment for the fabrication and characterisation of silicon and nanostructured devices.

Processing

MRL 1414 Diffusion Furnace

  

Diffusion and passivation of substrates up to 8"

 

 

AST 280 Rapid Thermal Processor

 

 

 

 

 

 

 

 

 

 Firing of metal contacts using precise fast ramp temperature profiles.

 

Temescal FC 1800 Evaporator

Vacnet Sputtering System

 

 

 

 

 

 

 

 

 

Wet Chemistry for Wafer Cleaning

Wet Chemistry for Wafer Texturing

Optically aligned screen printer for front surface contacts

Two Screen Printers for Rear Contacts

 

SRD

Spin Rinse Dryer  

At SPL we havespin rinse dryers for a variety of substrate types and process sequences.