Plasma Enhanced Chemical Vapor Deposition
The Applied Materials P-5000 is used as the primary PECVD deposition system in the Solar Power Laboratory. The system was custom modified by AXIC to accommodate square solar cell substrates. The tool is load locked and is configured with three process chambers. The process chambers are currently used for n-doped (phosphine dopant source), p-doped (Tri-methyl boron dopant source), and intrinsic a-Si, as well as for generic dielectric film deposition including SiN, SiON, and SiC.
PECVD Cluster Tool
Loading the system with a full wafer cassette