A SputterGlow tool manufactured by Glow Research is used as the sputtering system at the Solar Power Laboratory. Currently, it is a single target sputtering system but, if desired, the tool has the capability of being extended into a dual target system. The flexible substrate carriers employed can accommodate pieces or complete substrates up to 156 mm. A silicon target is installed in the SputterGlow tool and is used for reactively sputtering dielectric films on conventional diffused junction solar cells. The SputterGlow tool is outfitted with an RGA for precise control over the sputtering ambient.