Hitachi S7800 Scanning Electron Microscope
The Hitachi S-7800 SEM images the sample surface (from 4 to 8 inch wafers) or cross-section by scanning it with high energy beam of electrons. It uses a cold field emission electron gun and contains a 5 axis motorized specimen stage and a manual wafer exchange port. The resolution of the equipment is 5 nm. The tool is equipped with an EDS detector for basic elemental determination.
Specifications: Wafer size: 6" or 8". Resolution: 5nm. Magnification: 100x - 200,000x. Accelerating voltage: 0.5 kV - 15 kV. Range: 0.1um - 10um. Stage: X, Y: 0 - 200mm, Z: 4, 6, 8, 12 mm, T: 0 - 60°, R: 360°, Stopping accuracy: 10 um. Loader: cassette-to-cassette auto loader. Vacuum system: rotary, turbo and ion pumps.
This tool is available to external users for a reasonable fee. Please contact us for further details.