Metrology

Hitachi S7800 Scanning Electron Microscope

Wafer size: 6" or 8".  Resolution: 5nm. Magnification: 100x - 200,000x.  Accelerating voltage: 0.5 kV - 15 kV.  Range: 0.1um - 10um. Stage: X, Y: 0 - 200mm, Z: 4, 6, 8, 12 mm, T: 0 - 60°, R: 360°, Stopping accuracy: 10 um. Loader: cassette-to-cassette auto loader. Vacuum system: rotary, turbo and ion pumps.

Alessi Probe Station including Darkbox

Alessi Probe Station  

Sinton Lifetime Tester

Wafer size:  38-210 cm.
Wafer thickness: 10-2000 um.
Measurement modes: QSS, transient, generalized lifetime analysis.
Other modes: bias light, white and IR illumination, emitter saturation current analysis, resistivity.
Typical calibrated injection range: 1012-1016 cm-3.

 

  

Flash Solar Cell Tester

The flash cell tester can measure most types of substrate. The light intensity can be adjusted from 0.1 to 100 suns.

 

Rudolph AutoEL III Ellipsometer

Operating Principle: Null Seeking.
Operating Wavelength: 632.8nm.
Light Source: HeNe Laser.
Angle of Incidence: Standard Pin Locations: 70°±0.02 °and 90°±0.02°, Optional Pin Locations: 60° & 80°.
Resolution and Accuracy: Polarizer or analyzer: 0.05º, Delta: 0.1º, Psi: 0.05º, ±3Å, ±0.01 (Refractive index).
Measuring Time: Typical: 15 seconds, Double Film: 20 seconds.